Smith, Donald L.  1944- <br/><br/>
Thin-film deposition :  principles and practice / 
Donald L. Smith. 
 - New York :  McGraw-Hill,  c1995. 
 - xxiii, 616 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0070585024 0071139133 (International ed.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films.<br/>Vapor-plating.<br/>Thin film devices.
<br/><br/><label>Dewey Class. No.: </label>621.3815/2