Semiconductor device-based sensors for gas, chemical, and biomedical applications / edited by Fan Ren & Stephen J. Pearton.

Includes bibliographical references and index.

Machine generated contents note: 1.1. Introduction / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.2. A1GaN Field-Effect Sensors / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3. Fabrication and Characterization of A1GaN/GaN Sensors / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3.1. Growth of the Heterostructure / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3.2. Sensor Processing / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3.3. Electrical Characterization of the A1GaN/GaN Heterostructure / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3.4. Technology Impact on the Surface and Sensor Properties / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.3.5. Biocompatibility of the Sensor / M. Gebinoga / A. Schober / I. Cimalla / V. Lebedev / V. Cimalla / V. Polyakov

1.4. Measurement Conditions / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.1. Buffer Solutions / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.2. Characterization Setup / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.3. Noise and Drift / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.4. Cell-Based Sensor-CPFET / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.5. NG 108-15 Nerve Cell Line / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.6. Neurotransmitters-Acetylcholine / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.7. Neuroinhibitors / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.4.8. Cell Media / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.5. Cell Coupling to an A1GaN/GaN ISFET / V. Cimalla / I. Cimalla / V. Lebedev / A. Schober / V. Polyakov / M. Gebinoga

1.5.1. Sensor Preparation / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.5.2. Sensor Response to pH Changes in Cell Media with/without Cells / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.5.3. Ion Sensitivity of AlGaN/GaN ISFETs / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.5.4. Sensitivity of A1GaN/GaN ISFETs to Inhibitors / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.6. Recording of Extracellular Signal / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.6.1. Response on Single Inhibitors in SCZ Buffer / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.6.2. Response on Single Inhibitors in DMEM / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.6.3. Sensor Response on Different Neurotoxins / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.7. Sensor Signal Simulation / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober

1.7.1. Self-Consistent Simulation of the Heterostructure Using a Site-Binding Model / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 1.7.2. Estimation of the Ion Flux in Cleft / V. Polyakov / V. Lebedev / A. Schober / I. Cimalla / M. Gebinoga / V. Cimalla -- 1.8. Summary / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- Acknowledgments / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- References / I. Cimalla / M. Gebinoga / V. Cimalla / V. Polyakov / V. Lebedev / A. Schober -- 2.1. Introduction / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.2. Gas Sensing / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.2.1. O2 Sensing / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.2.2. CO2 Sensing / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.2.3. CH4 Sensing / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.3. Sensor Functionalization / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.4. pH Measurement / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton

2.5. Exhaled Breath Condensate / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.6. Heavy Metal Detection / Jenshan Lin / F. Ren / S.J. Pearton / C.Y. Chang / B.H. Chu -- 2.7. Biotoxin Sensors / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.7.1. Botulinum / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8. Biomedical Applications / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.1. pH Sensing in Breath Condensate / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.2. Glucose Sensing / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.3. Prostate Cancer Detection / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.4. Kidney Injury Molecule Detection / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.5. Breast Cancer / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.6. Lactic Acid / B.H. Chu / C.Y. Chang / S.J. Pearton / Jenshan Lin / F. Ren -- 2.8.7. Chloride Ion Detection / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton

2.8.7.1. HEMT Functionalized with Ag/AgC1 / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.7.2. HEMT Functionalized with InN / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.8.8. Pressure Sensing / S.J. Pearton / Jenshan Lin / C.Y. Chang / B.H. Chu / F. Ren -- 2.8.9. Traumatic Brain Injury / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.9. Endocrine Disrupter Exposure Level Measurement / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.10. Wireless Sensors / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 2.11. Summary and Conclusions / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- Acknowledgments / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- References / B.H. Chu / C.Y. Chang / F. Ren / Jenshan Lin / S.J. Pearton -- 3.1. Introduction / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2. A1GaN/GaN HEMT Schottky-Diode-Based Hydrogen Sensor / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang

3.2.1. Basic Schottky Diode Hydrogen Sensor / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2.1.1. Device Structure and Fabrication / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2.1.2. Testing Procedure / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2.1.3. Experimental Results / Byung Hwan Chu / Yu-Lin Wang / Travis J. Anderson / Jenshan Lin / Fan Ren / Stephen J. Pearton -- 3.2.2. TiB2 Ohmic Contacts / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2.3. Effect of Humidity on Hydrogen Sensors / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.2.4. Differential Sensor / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.3. GaN Schottky Diode Sensor / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.3.1. N-face and Ga-face Comparison / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang

3.3.1.1. Device Structure and Fabrication / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.3.1.2. Experimental Results / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.3.2. W/Pt-Contacted GaN Schottky Diodes / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.4. Nanostructured Wide-Bandgap Materials / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.4.1. Hydrogen Sensors Based on ZnO Nanorods / Fan Ren / Travis J. Anderson / Jenshan Lin / Yu-Lin Wang / Stephen J. Pearton / Byung Hwan Chu -- 3.4.1.1. Device Structure and Fabrication / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.4.1.2. Experimental Results / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.4.2. GaN Nanowires / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang

3.4.3. InN Nanobelts / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.4.4. Single ZnO Nanowire / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang

Note continued: 3.5. SiC Schottky Diode Hydrogen Sensor / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.6. Wireless Sensor Network Development / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.6.1. Sensor Module / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.6.1.1. Description of Wireless Transceiver / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.6.1.2. Description of Web Server / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.6.2. Field Test / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang / Travis J. Anderson / Byung Hwan Chu / Fan Ren -- 3.6.2.1. Initial Field Test Results / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang

3.6.2.2. Improved Field Test Results / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 3.7. Summary / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- Acknowledgments / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- References / Travis J. Anderson / Byung Hwan Chu / Fan Ren / Stephen J. Pearton / Jenshan Lin / Yu-Lin Wang -- 4.1. Introduction / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.2. Surface Properties of InN / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.2.1. Electronic Properties / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.2.2. Chemical Sensing Properties / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo

4.3. InN-Based Chemical Sensors Development / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.3.1. Ion-Selective Electrode (ISE) / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.3.1.1. Device Fabrication / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.3.1.2. Testing Procedure and Results / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.3.2. Ion-Sensitive Field-Effect Transistor (ISFET) / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.3.2.1. Device Fabrication / Hong-Mao Lee / Shangjr Gwo / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong -- 4.3.2.2. Testing Procedure and Results / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- 4.4. Summary / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo

Acknowledgments / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / Shangjr Gwo -- References / Yuh-Hwa Chang / Yen-Sheng Lu / J. Andrew Yeh / Yu-Liang Hong / Hong-Mao Lee / 5.1. Introduction / Y.W. Heo / S.J. Pearton / D.P. Norton / F. Ren -- 5.2. Basic Properties of ZnO / F. Ren / D.P. Norton / Y.W. Heo / S.J. Pearton -- 5.3. Dopants in ZnO / F. Ren / D.P. Norton / S.J. Pearton / Y.W. Heo -- 5.4. Ion Implantation / S.J. Pearton / F. Ren / D.P. Norton / Y.W. Heo -- 5.5. Etching of ZnO / D.P. Norton / F. Ren / S.J. Pearton / Y.W. Heo -- 5.6. Ohmic Contacts / S.J. Pearton / F. Ren / D.P. Norton / Y.W. Heo -- 5.7. Schottky Contact / D.P. Norton / F. Ren / S.J. Pearton / Y.W. Heo -- 5.8. Properties of Hydrogen in ZnO / S.J. Pearton / F. Ren / D.P. Norton / Y.W. Heo -- 5.8.1. Proton Implantation / D.P. Norton / F. Ren / S.J. Pearton / Y.W. Heo -- 5.8.2. Hydrogen Plasma Exposure / S.J. Pearton / D.P. Norton / F. Ren / Y.W. Heo -- 5.9. Ferromagnetism in ZnO / S.J. Pearton / Y.W. Heo / D.P. Norton / F. Ren

5.9.1. Ferromagnetism in Semiconductors / Y.W. Heo / S.J. Pearton / D.P. Norton / F. Ren -- 5.9.2. Spin Polarization in ZnO / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.9.3. Nanorods / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.9.4. Properties of Mn- and Co-Implanted Bulk ZnO / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.10. Gas Sensing Using ZnO Thin Film / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.10.1. Ethylene Sensing / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.10.2. CO Sensing / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.11. Transport in ZnO Nanowires / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.12. ZnO Nanowire Schottky Diodes / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.13. ZnO Nanowire MOSFET / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.14. UV Nanowire Photodetectors / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.15. Gas and Chemical Sensing / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.15.1. Hydrogen Sensing with ZnO nanowires / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton

5.15.2. Ozone Sensing / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.15.3. pH Response / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16. Biological Sensing / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.1. Surface Modification of ZnO / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.2. Using Protein Immobilization for Ultrasensitive Detection of Proteins and Single Viruses / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.3. Immobilization of Nucleic Acids on Nanowires for Biosensors for Genes and mRNA / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.4. Direct Immobilization of Aptamers for Ultrasensitive Detection of Proteins and Drug Molecules / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.5. ZnO Nanowires with Various Doping and Surface Chemistry Terminations / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.16.6. A 3D Self-Consistent Simulator for a Biological Sensor / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- 5.17. Summary / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- Acknowledgments / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton -- References / Y.W. Heo / F. Ren / D.P. Norton / S.J. Pearton

6.1. Introduction / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2. Models of BioFET Device Operation / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.1. FET Operation / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.1.1. Charge in a MOSFET / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen -- 6.2.1.2. Charge Sheet Models for MOSFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.1.3. Capacitance / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.1.4. Operation of the BioFET / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.1.5. Monitoring the Threshold Voltage / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.2.2. The Oxide Surface and the Electrolyte / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.2.1. The Electrolyte and Double Layer / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.2.2. The Oxide Surface in an Electrolyte / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.2.3. Other Insulators / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen -- 6.2.3. Molecules on the Oxide Surface / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.3.1. Linker Layer / D. Landheer / W.R. McKinnon / W.H. Jiang / G. Lopinski / G. Dubey / N.G. Tarr / M.W. Shinwari / M.J. Deen -- 6.2.3.2. Charged Membrane-Especially Oligonucleotides / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.2.3.3. Electrostatics of Brushes and the Donnan Potential / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.4. Membrane Model and Poisson-Boltzmann Analysis / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.4.1. Donnan Potential / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.4.2. Change with Hybridization / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5. Small-Signal Analysis and Sensitivities / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen

Note continued: 6.2.5.1. Effects of pH and Hydroxyl Density / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5.2. Ion Sensitivity versus Charge Sensitivity / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5.3. Complexation / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5.4. Impermeable Linking Layer / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5.5. Permeable Linking Layer / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.5.6. Transient Effects due to Mixing / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.2.5.7. Size of the Signal / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.6. Large-Signal Models of the BioFET / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen -- 6.2.7. Limitations of the 1-D Model / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.7.1. Manning Condensation / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.7.2. Other Mechanisms for the Signal in a BioFET / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.7.3. The Mystery of High Signals / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.2.8. Comparison with Measurements / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.2.9. BioFET Simulations in 3-D / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3. Impedance Measurements on BioFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.1. Impedance of ISFETs, REFETs, and the First Biomembranes / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen -- 6.3.1.1. ISFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.1.2. REFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.1.3. Measurement of Differential Output with ISFFET/REFET Pairs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.1.4. First Impedance Studies of Protein Membranes / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.3.1.5. Series Resistance of the Electrolyte / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.2. Membrane Sensors / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.2.1. Ion-Selective Surfaces / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.2.2. Antigen[-]Antibody Conjugation / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen -- 6.3.2.3. Electrochemical (Faradaic) Impedance Spectroscopy / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.2.4. EnFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.3. Detection of DNA Hybridization / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.3.3.1. SNP Detection in Prehybridized DNA / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.3.3.2. SNP Detection for In Situ Hybridization / D. Landheer / W.R. McKinnon / W.H. Jiang / G. Lopinski / G. Dubey / N.G. Tarr / M.W. Shinwari / M.J. Deen -- 6.4. MOS Nanowire BioFETs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.1. Bioaffinity Sensing with SiNWs / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.1.1. Probe Target Binding and the Langmuir Model / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.1.2. History / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.2. SiNWs Grown by the VLS Method / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.4.3. Planar MOS Nanowires-No Gating / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.4. Back-Gated Planar Sensors / M.W. Shinwari / M.J. Deen / D. Landheer / N.G. Tarr / W.H. Jiang / G. Lopinski / G. Dubey / W.R. McKinnon -- 6.4.4.1. Attomolar Detection of Proteins / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.4.2. Demonstrations of Back-Gated SiNW Bioaffinity Sensor Performance / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.4.3. Nanoribbons / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.5. Eliminating the Oxide Layer / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.6. Alternate Nanowire Fabrication Methods / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski

6.4.7. Nanowire Electrical Models / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.7.1. Cylindrical Membranes / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.7.2. Determination of Nanowire Capacitance and Surface Potential / M.W. Shinwari / M.J. Deen / D. Landheer / N.G. Tarr / W.H. Jiang / G. Lopinski / G. Dubey / W.R. McKinnon -- 6.4.7.3. 3-D Models / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.8. Slow Response due to Diffusion / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- 6.4.9. Conclusions / D. Landheer / W.R. McKinnon / W.H. Jiang / M.J. Deen / G. Dubey / N.G. Tarr / M.W. Shinwari / G. Lopinski -- References / D. Landheer / W.R. McKinnon / W.H. Jiang / G. Lopinski / G. Dubey / N.G. Tarr / M.W. Shinwari / M.J. Deen -- 7.1. MEMS Introduction / Z.M. Qi / H. Xie -- 7.1.1. MEMS Overview / Z.M. Qi / H. Xie

7.1.2. MEMS Fabrication / Z.M. Qi / H. Xie -- 7.1.3. Chapter Outline / Z.M. Qi / H. Xie -- 7.2. Optical Sensing Principles / Z.M. Qi / H. Xie -- 7.3. MEMS-Based Fourier Transform Spectroscopy for Chemical Sensing / Z.M. Qi / H. Xie -- 7.3.1. Quantized States in Molecules / Z.M. Qi / H. Xie -- 7.3.2. Optical Spectroscopy / Z.M. Qi / H. Xie -- 7.3.3. Fourier Transform Spectroscopy / Z.M. Qi / H. Xie -- 7.3.4. Fourier Transform Infrared Spectroscopy / Z.M. Qi / H. Xie -- 7.3.5. MEMS FTIR / Z.M. Qi / H. Xie -- 7.3.5.1. MEMS Actuators / Z.M. Qi / H. Xie -- 7.3.5.2. Miniature FTIR Based on Electrostatic Micromirrors / Z.M. Qi / H. Xie -- 7.3.5.3. Miniature FTIR Based on Electromagnetic Micromirrors / Z.M. Qi / H. Xie -- 7.3.5.4. Miniature FTIR Based on Electrothermal Micromirrors / Z.M. Qi / H. Xie -- 7.3.5.5. A Mirror-Tilt-Insensitive (MTI) Fourier Transform Spectrometer / Z.M. Qi / H. Xie -- 7.3.6. Summary / Z.M. Qi / H. Xie -- 7.4. Interferometric MEMS Chemical and Biochemical Sensors / Z.M. Qi / H. Xie -- 7.4.1. Introduction / Z.M. Qi / H. Xie

7.4.2. Integrated Optical Mach-Zehnder Interferometer (MZI) Sensors / Z.M. Qi / H. Xie -- 7.4.3. Composite Waveguide-Based Polarimetric Interferometer (PI) Sensors / Z.M. Qi / H. Xie -- 7.4.4. Integrated Optical Young Interferometer (YI) Sensors / Z.M. Qi / H. Xie -- 7.4.4.1. Sensing Principle of Integrated Optical YI / Z.M. Qi / H. Xie -- 7.4.4.2. Slab-Type YI Sensors / Z.M. Qi / H. Xie -- 7.4.4.3. Stripe-Type YI Sensors / Z.M. Qi / H. Xie -- 7.4.5. Integrated Optical Fabry-Perot Interferometer (FPI) Sensor / Z.M. Qi / H. Xie -- 7.4.6. Conclusion / Z.M. Qi / H. Xie -- References / Z.M. Qi / H. Xie.